| Element Size | Flow Rate 流量 (NM³/Min) |
| 0205 | 0.16 |
| 0305 | 0.5 |
| 0310 | 1 |
| 0410 | 1.5 |
| 0420 | 2 |
| 0520 | 3 |
| 0525 | 4.5 |
| 0725 | 6 |
| 0530 | 7 |
| 0730 | 8 |
| 1030 | 12 |
| 1530 | 18 |
| 2030 | 24 |
| 3030 | 32 |
| 3050 | 48 |
| 等 級 | SB | FF | MF | SMF | AK |
| 材 質 | Sinter Porous Bronze | Pleated Borosilicate | Pleated Borosilicate | Pleated Borosilicate | Activated Carbon |
| 精 度 | 5, 25, 50 μm | 0.01 μm | 0.01 μm | 0.01 μm | 0.01 μm |
| 油份殘留量 | N/A | 0.01 mg/m³ | 0.03 mg/m³ | 0.01 mg/m³ | 0.003 mg/m³ |
| 最大操作溫度 | 120℃ (248˚F) |
120℃ (248˚F) |
120℃ (248˚F) |
120℃ (248˚F) |
120℃ (248˚F) |
| O-ring | Buna-N, Viton | ||||
| 中柱材質 | SUS304 | ||||
| 端蓋材質 | Aluminum | ||||