| Element Size | Flow Rate 流量 (NM³/Min) |
| 1030 | 0.5 |
| 1050 | 0.85 |
| 1070 | 1.2 |
| 1140 | 1.7 |
| 2010 | 3.0 |
| 2020 | 5.0 |
| 2030 | 7.8 |
| 2050 | 11.7 |
| 3050 | 16.0 |
| 3075 | 24.0 |
| 等 級 | V | Z | X | A | |
| 材 質 | Pleated Cellulose | Pleated Borosilicate | Pleated Borosilicate | Activated Carbon | |
| 精 度 | 3 μm | 1 μm | 0.01 μm | N/A | |
| 油份殘留量 | 5 mg/m³ | 0.5 mg/m³ | 0.01 mg/m³ | 0.003mg/m³ | |
| 最大操作溫度 | 120℃ (248˚F) |
120℃ (248˚F) |
120℃ (248˚F) |
120℃ (248˚F) |
|
| O-ring | Buna-N, Viton | ||||
| 中柱材質 | SUS304 | ||||
| 端蓋材質 | Aluminum | ||||